Shulou(Shulou.com)11/24 Report--

Suzhou Shengtuo Semiconductor Technology Co., Ltd. was established in August 2021, covering an area of 4000 square meters. The company is engaged in the R & D, design, production, sales and technical services of key components and machine integration systems in the field of semiconductor manufacturing equipment, and is committed to providing customers with one-stop solutions for semiconductor equipment.

The company's main products: special motors for lithography machines and vacuum water-cooled special motors, proximity lithography machines, laser interferometers, micro-environment control systems, ultra-precision control boards, air floats, nano-precision motion tables, wafer manipulators ROBOT, pre-alignment modules Pre-Aligner and Efem and other products.

Integrated measurement standard platform

The integrated measurement standard platform is an integrated equipment for wafer defect detection and size measurement. With the continuous design optimization of the structure, core components and key technologies of the professional R & D team, the integrated platform motion platform can achieve micro-to nano-level positioning accuracy and repeated positioning accuracy. The integrated platform can be equipped with different precision sports platform, vibration isolation system and EFEM, which can meet the needs of different customers.

Product advantages:

1. Use different testing techniques (optical, electron beam) to detect defects in wafers.

two。 The shafting has a wide range of motion, which is suitable for a variety of automatic detection applications, and is compatible with wafers of different sizes.

3. The device supports SEMI S2 authentication.

Active shock absorber

The shock absorber uses air bag to achieve passive vibration isolation, voice coil motor to achieve active vibration reduction, signal acquisition through the sensor, feedback to the front end, the use of voice coil motor rapid response to achieve six degrees of freedom directional vibration elimination. Main configuration: air flotation module, brake module, signal monitoring module, controller module. Support customization.

Technical parameters:

Load: 1.2 tons / 3.5 tons / 5.5 tons

Control degrees of freedom: 3 axes and 6 degrees of freedom

Vibration isolation range: 1-1000Hz

Damping performance: @ 2Hz, 60% ≥ 10Hz, ≥ 99%

Natural frequency: vertical / horizontal 1.5-2.5 Hz.

Atmospheric manipulator

It is used in the dust-free environment of wafer Wafer to achieve low vibration and smooth and fast transmission and transportation. Double ARM is adopted to realize high-speed transmission of wafers and simultaneous access and playback of wafers. Main configuration: manipulator base, Z-axis module, transmission mechanical arm, end effector, controller.

Technical parameters:

Wafer size: 4 "6" 8 "12"

Repetitive positioning accuracy: ±0.1mm

Z-axis stroke: 340mm

Cleanliness: Class 100

End adaptation: vacuum suction fork, clamp fork, flip fork.

Welcome to subscribe "Shulou Technology Information " to get latest news, interesting things and hot topics in the IT industry, and controls the hottest and latest Internet news, technology news and IT industry trends.