Shulou(Shulou.com)11/24 Report--

CTOnews.com July 18 news, recently, North Huachuang Technology Group Co., Ltd. (hereinafter referred to as "North Huachuang") officially released the 12-inch plasma etching machine Accura BE used in crystal edge etching (Bevel Etch) process, claiming to achieve domestic crystal edge dry etching equipment "zero" breakthrough, tailor-made for China's advanced chip manufacturing yield to enhance efficient solutions.

▲ source North Huachuang official account according to reports, in the device manufacturing process, due to the substantial growth of film deposition, lithography, etching and chemical mechanical polishing and other process steps, resulting in the inevitable accumulation of by-products and residues at the edge of the wafer, the defect risk caused by the sudden increase of these by-products and residues has become a serious threat to the product yield. More and more manufacturers in the fields of logic and memory chips begin to focus on the edge 1mm region of 12-inch wafers to improve the chip yield from the edge position of the wafer. As a powerful guarantee for the industry to improve the yield, the crystal edge etching machine is becoming more and more important.

As the first domestic 12-inch crystal edge etching equipment, the technical performance of Accura BE has "reached the mainstream level of the industry". The highlights of the official promotion of CTOnews.com are as follows:

Through the combination of software system scheduling optimization and unique transmission platform, customers can achieve higher production capacity.

By selecting a variety of etching gases, the crystal edge etching process of many kinds of film materials such as PR (photoresist), OX (oxide), SiN (silicon nitride), Carbon (carbon), Metal (metal) and so on can be fully covered.

The focus ring design combination of various sizes can be customized to realize the precise position control of the plasma etching area, thus providing customers with a flexible and comprehensive yield improvement scheme.

With software intelligent algorithm, it can implement visual quantitative adjustment, simplify maintenance process and improve equipment production efficiency.

North China Chuang said that as soon as Accura BE was released and listed on the market, it had won a number of orders from customers in the field of logic and memory, and entered the stage of mass production through process debugging.

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