Shulou(Shulou.com)11/24 Report--

Thank you, Mr. Air, a netizen of CTOnews.com, for your clue delivery! CTOnews.com December 17 news, core source micro is the domestic glue development subdivision field leader. The company announced today that it will hold a new product launch on the occasion of its 20th anniversary and launch the latest generation of front-end immersion high-performance glue developer FT (III) 300.

According to reports, this model uses the original symmetrically distributed high-yield architecture, fully equipped with 36 Spin processing units, and is equipped with independently developed two-way synchronous take-off manipulators, which can greatly improve the mechanical transmission capacity and transmission accuracy of the whole machine, can match the online production of global mainstream lithography machines, and can achieve a production capacity of more than 300 pieces under complex processes.

This model can fully cover a variety of lithography technologies such as I-line, KrF, ArF dry, ArF immersion, etc., and is also suitable for other spin-coating applications, including SOC, SOH, SOD and so on.

In order to cope with the continuous improvement of the production capacity of the lithography machine in the future, the machine can also be expanded to more processing units, and at the same time, it can take into account the machine maintainability under low occupation area, and effectively improve the machine maintenance efficiency.

CTOnews.com learned that the model can also be expanded to more processing units, from the current 36 Spin to 48 Spin, increasing production capacity to 360 tablets per hour, while taking into account machine maintainability under low footprint, effectively improving machine maintenance efficiency.

Cheng Hu, director of the core source micro-front design department, said that as the third-generation model independently developed by Core Source Micro, the immersion high-energy glue developer has the advantages of high production capacity, high process capability, high cleanliness, high expansibility and easy maintenance. At present, this model has passed the client verification, met the customer mass production requirements, successfully broke the foreign monopoly and filled the domestic gap.

▲ source: core source micro in addition, the machine is also equipped with precise temperature modulation (PTM) technology developed by the company, making the hot plate baking temperature uniformity to the industry-leading level; with a new Spin unit real-time control technology, it can effectively improve the machine motion control and fluid control accuracy, responsiveness and stability, and continuously reduce costs for customers. The flow field of the whole machine is optimized by simulation to ensure the uniformity and stability of the internal micro-environment and improve the cleanliness level of the whole machine; a full series of auxiliary function units, including AOI and WEE systems, can detect wafer process defects online and reduce the outflow of bad products.

Welcome to subscribe "Shulou Technology Information " to get latest news, interesting things and hot topics in the IT industry, and controls the hottest and latest Internet news, technology news and IT industry trends.