Shulou(Shulou.com)11/24 Report--

Thanks to CTOnews.com netizen assassin's clue delivery! CTOnews.com August 15 news, according to the North Huachuang official announcement, today, North Huachuang officially released CCP dielectric etching machine, has been verified in 5 customers and achieved mass production. Before this, North Huachuang has launched ICP etching machine, metal etching machine, etc. to realize full coverage of etching process.

North Huachuang NMC508 RIE dielectric etching machine adopts 8-inch equipment with 20-year process foundation; specially designed chamber and hardware for 8-inch process to meet customization requirements; 6 & 8-inch compatibility to achieve fast switching; currently, it has been verified and mass produced in 5 customers; supports 18-year mature software system application, and stable spare parts system, equipped with reliable supply chain; Equipped with a full service team, it can provide all-round guarantee including process development, parts supply, software upgrade, warranty service, etc.

According to the official introduction, NMC508 RIE dielectric etching machine has the characteristics of good etching morphology, high selectivity ratio and superior process performance in the former process; in the latter process, it can realize effective control of metal by-products and long maintenance cycle; adopting multi-frequency RF technology, it has the characteristics of high etching rate, good process uniformity and large process window, which can better meet the application development trend of deep hole small CD; In the wafer transfer platform system, the self-developed universal platform is adopted, with mature software system and automatic wafer centering (AWC) function, which meets the requirements of stable wafer transfer operation; in the chamber design, the unique anti-plasma striking structure and accurate electrode temperature control design are adopted, with temperature zone control function, and the endpoint detection system is equipped to meet the requirements of uniformity and endpoint capture of key etching processes, and the particles perform well; Long consumable life and easy maintenance to meet your low cost of ownership (COO) and consumption (COC) needs. As CCP etching machine, it has the advantages of high selectivity and high etching rate in dielectric etching, and is suitable for dielectric silicon oxide, silicon nitride, silicon oxynitride and other film materials. It can provide customers with a variety of characteristic processes including logic devices, power devices, compound semiconductors, etc. The main application fields include but are not limited to Logic, BCD, Power (Si / SiC / GaN), MEMS;

The launch of NMC508 RIE dielectric etching machine completes the last piece of jigsaw puzzle of domestic equipment technology in this field and realizes the overall solution of North Huachuang on 8-inch etching equipment, including silicon etching, deep silicon etching, metal etching, compound semiconductor etching (SiC, GaN, GaAs, InP, LiNbO3, LiTaO3, etc.).

North Huachuang can also provide 8-inch equipment including PVD, CVD, ALD, furnace tube, cleaning, etc., providing a total solution.

Home Etching Machine of Big Country Heavy Equipment: Chinese Chip Burning Fire

Welcome to subscribe "Shulou Technology Information " to get latest news, interesting things and hot topics in the IT industry, and controls the hottest and latest Internet news, technology news and IT industry trends.